Hergenrother, J.M. ; Nigani, T. ; Wilk, O.D. ; Klemens, F.P. ; Monroe, D. ; Sorsch, T.W. ; Busch, B. ; Green, M.L. ; Muller, D.A. ; Voyles, P.M. ; Grazul, J.L. ; Shero, E.J. ; Givens, M.E. ; Pomarede, C. ; Mazanecand, M. ; Werkhoven, C.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.929-942, 2002. Pennington, NJ. Electrochemical Society
Hergenrother, J.M. ; Nigani, T. ; Wilk, O.D. ; Klemens, F.P. ; Monroe, D. ; Sorsch, T.W. ; Busch, B. ; Green, M.L. ; Muller, D.A. ; Voyles, P.M. ; Grazul, J.L. ; Shero, E.J. ; Givens, M.E. ; Pomarede, C. ; Werkhoven, M.Mazanecand C.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.929-942, 2002. Pennington, NJ. Electrochemical Society
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.163-170, 2001. Pennington, NJ. Electrochemical Society
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.381-392, 2001. Pennington, NJ. Electrochemical Society
Radermacher, K. ; Jebasinski, R. ; Mantl, S. ; Monroe, D. ; White, A. E. ; Short, K. T.
出版情報:
Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.209-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Alers, G. B. ; Monroe, D. ; Krisch, K. S. ; Weir, B. E. ; Chang, A. M.
出版情報:
Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.311-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Weir, B. E. ; Silverman, P. J. ; Alers, G. B. ; Monroe, D. ; Alam, M. A. ; Sorsch, T. W. ; Green, M. L. ; Timp, G. L. ; Ma, Y. ; Frei, M. ; Liu, C. T. ; Bude, J. D. ; Krisch, K. S.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.301-, 1999. Warrendale, PA. MRS - Materials Research Society