Herner, S. B. ; Krishnamoorthy, V. ; Jones, K. S. ; Mogi, T. K. ; Gossmann, H-J.
出版情報:
Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.157-, 1997. Pittsburgh, Penn. MRS - Materials Research Society
Gossmann, H. J. ; Rafferty, C. S. ; Stolk, P. A. ; Eaglesham, D. J. ; Gilmer, G. H. ; Poate, J. M. ; Vuong, H.-H. ; Mogi, T. K. ; Thompson, M. O.
出版情報:
Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.3-, 1995. Pittsburgh. MRS - Materials Research Society