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586e. Characterization of Copper Chemical Mechanical Polishing in Nitric Acid Slurries

著者名:
掲載資料名:
2005 annual meeting & fall showcase : '05 AIChE, Oct 30 - Nov 4 : conference proceedings, Cincinnati Convention Center, Cincinnati, OH : non-topical presentation records : 08. Materials Engineering and Sciences Division
シリーズ名:
AIChE Conference Proceedings
シリーズ巻号:
P-221(2)
発行年:
2005
総ページ数:
1
出版情報:
New York: American Institute of Chemical Engineers
ISBN:
9780816909964 [0816909962]
言語:
英語
請求記号:
A08000/2005 [CD-ROM]
資料種別:
国際会議録

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