19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California. Part1 pp.468-476, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan. pp.72-83, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the 15th International Conference on Defects in Semiconductors : Budapest, Hungary, August 22-26, 1988. Part3 pp.1009-1014, 1989. Aederlmannsdorf, Switzwelns. Trans Tech Publications
Vacancies and interstitials in metals and alloys : Proceedings of the International Conference on Vacancies and Interstitials in Metals and Alloys held in Berlin, Germany, September 14-19, 1986. Pt.1 pp.105-110, 1987. Aederlmannsdorf, Switzerland. Trans Tech Publications
Vacancies and interstitials in metals and alloys : Proceedings of the International Conference on Vacancies and Interstitials in Metals and Alloys held in Berlin, Germany, September 14-19, 1986. Pt.2 pp.777-782, 1987. Aederlmannsdorf, Switzerland. Trans Tech Publications
Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California. pp.102-111, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of fluorescence detection IV : 1-2 February 1996, San Jose, California. pp.103-109, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of lasers in surgery : advanced characterization, therapeutics, and systems VI : 27-30 January 1996, San Jose, California. pp.36-39, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Photomask and Next-Generation Lithography Mask Technology VII. pp.594-604, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering