Hirose, M. ; Mizubayashi, W. ; Fukuda, M. ; Miyazaki, S.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.730-744, 1998. Pennington, NJ. Electrochemical Society
Imafuku, D. ; Mizubayashi, W. ; Miyazaki, S. ; Hirose, M. ; Wakayama, Y. ; Kobayashi, S.
出版情報:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.101-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Horikawa, T. ; Yasuda, N. ; Mizubayashi, W. ; Iwamoto, K. ; Tominaga, K. ; Akiyama, K. ; Yamamoto, K. ; Hisamatsu, H. ; Ota, H. ; Nabatame, T. ; Toriumi, A.
出版情報:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.292-303, 2004. Pennington, NJ. Electrochemical Society
Imafuku, D. ; Mizubayashi, W. ; Miyazaki, S. ; Hirose, M. ; Wakayama, Y. ; Kobayashi, S.
出版情報:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.161-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Mizubayashi, W. ; Itokawa, H. ; Miyazaki, S. ; Hirose, M.
出版情報:
The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000. pp.409-418, 2000. Pennington, N.J.. Electrochemical Society
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