Ren, F.Y.G. ; Michel, J. ; Sun-Paduano, Q. ; Zheng, B. ; Kitagawa, H. ; Jacobson, D.C. ; Poate, J.M. ; Kimerling, L.C.
出版情報:
Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.415-424, 1993. Pittsburgh, PA. Materials Research Society
Willach, J. ; Kreutz, E.W. ; Michel, J. ; Niessen, M. ; Schulz, W. ; Poprawe, R.
出版情報:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.435-440, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.350-357, 1995. Pennington, NJ. Electrochemical Society
Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.185-188, 1988. Pittsburgh, Pa.. Materials Research Society
Michel, J. ; Jeong, J. ; Lee, K.M. ; Kimergling, L.C.
出版情報:
Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.151-156, 1990. Pittsburgh, Pa.. Materials Research Society
M'saad, H. ; Michel, J. ; Reddy, A. ; Kimerling, L.C.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.505-513, 1994. Pennington, NJ. Electrochemical Society