Hunt, T. D ; Reeson, K. I. ; Gwilliam, R. M. ; Homewood, K. P. ; Wilson, R. J., ; Spraggs, R. S. ; Sealy, B. J. ; Meekison, C. D. ; Booker, G. R. ; Oberschachtsiek, P.
出版情報:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.239-244, 1992. Pittsburgh, Pa.. Materials Research Society
Meekison, C. D. ; Booker, G. R. ; Reeson, K. J. ; Hemment, P. L. F. ; Celler, G. K.
出版情報:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.467-472, 1988. Pittsburgh, Pa.. Materials Research Society