Baine, P. ; Gamble, H. ; Armstrong, B.M ; Bain, M. ; McNeill, D.W. ; Hamel, J. ; Stefanos, S. ; Kraft, M.
出版情報:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.57-63, 2003. Pennington, NJ. Electrochemical Society
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.313-320, 1997. Pennington, NJ. Electrochemical Society
Bain, M.F. ; Baine, P. ; McNeill, D.W. ; Srinivasan, G. ; Jankovic, N. ; McCartney, J. ; Moore, R.A. ; Armstrong, B.M. ; Gamble, H.S.
出版情報:
Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment. pp.103-108, 2005. Dordrecht. Kluwer Academic Publishers
シリーズ名:
NATO science series. Series 2, Mathematics, physics and chemistry
Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.. pp.E7.4-, 2001. Warrendale, PA. Materials Research Society
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