Berry, G.J. ; Cairns, J.A. ; Davidson, M.R. ; Fan, Y.C. ; Fitzgerald, A.G. ; Fzea, A.H. ; Lobban, J. ; McGivern, P. ; Thomson, J.
出版情報:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.231-236, 1999. Warrendale, Pa.. Materials Research Society
Berry, G.J. ; Cairns, J.A. ; Davidson, M.R. ; Fan, Y.C. ; Fitzgerald, A.G. ; Fzea, A.H. ; Lobban, J. ; McGivern, P. ; Thomson, J.
出版情報:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.225-230, 1999. Warrendale, Pa.. Materials Research Society
Berry, G.J. ; Gairns, J.A. ; Davidson, M.R. ; Fan, Y.C. ; Fitzgerald, A.G. ; Fzea, A.H. ; Lobban, J. ; McGivern, P. ; Thomson, J. ; Shaikh, W.
出版情報:
Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.249-254, 2001. Warrendale, Pa.. Materials Research Society