Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.. pp.47-58, 2003. Warrendale, Pa.. Materials Research Society
Moon, Bum Ki ; Iijima, Tadashi ; Malhotra, Sandra ; Simon, Andrew ; Thomas Shaw, ; Ryan, E. Todd ; Labelle, Cathy ; Fuller, Nick ; Bolom, Tibor ; Dunn, Derren ; Flaitz, Philip ; Mehta, Sanjay ; Inoue, Keishi ; McGahay, Vincent
出版情報:
Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.221-226, 2005. Warrendale, Pa.. Materials Research Society
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