Boelen, P. ; Matthews, R. ; Kashkoush, I. ; Novak, R.
出版情報:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.15-22, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.471-479, 1997. Pennington, NJ. Electrochemical Society
Boelen, P. ; Lardin, T. ; Sandrier, B. ; Matthews, R. ; Kashkoush, I. ; Novak, R. ; Tardif, F.
出版情報:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.161-167, 1997. Pennington, NJ. Electrochemical Society
Kashkoush, I. ; Matthews, R. ; Novak, R. ; Brause, E. ; Carrillo, F. ; Rajaram, B.
出版情報:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.173-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Electrical, optical, and magnetic properties of organic solid state materials : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.745-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society