Yamada, I. ; Toyada, N. ; Matsuo, J. ; Allen, L. P.
出版情報:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.51-60, 2003. Pennington, NJ. Electrochemical Society
Yamada, I. ; Matsuo, J. ; Jones, E. C. ; Takeuchi, D. ; Aoki, T. ; Goto, K. ; Sugii, T.
出版情報:
Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.363-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.265-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.147-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.279-, 1996. Pittsburgh. MRS - Materials Research Society
Matsuo, J. ; Qin, W. ; Akizuki, M. ; Yodoshi, T. ; Yamada, I.
出版情報:
Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A.. pp.87-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Seki, T. ; Tanomura, M. ; Aoki, T. ; Matsuo, J. ; Yamada, I.
出版情報:
Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A.. pp.93-, 1999. Warrendale, Pa.. MRS - Materials Research Society
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