Maszara, W. ; Sadana, D. K. ; Rozgonyi, G. A. ; Sands, T. ; Washburn, J. ; Wortman, J. J.
出版情報:
Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.. pp.277-286, 1985. Pittsburgh, Pa.. Materials Research Society
Salih, A. S. M. ; Maszara, W. ; Kim, H. J. ; Rozgonyi, G. A.
出版情報:
Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.. pp.61-70, 1985. Pittsburgh, Pa.. Materials Research Society
Myers, E. ; Rozgonyi, G.A. ; Sadana, D.K. ; Maszara, W. ; Wortman, J.J. ; Narayan, J.
出版情報:
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.. pp.107-114, 1985. Pittsburgh, Pa.. Materials Research Society
Maszara, W. ; Carter, C. ; Sadana, D. K. ; Liu, J. ; Ozguz, V. ; Wortman, J. ; Rozgonyi, G. A.
出版情報:
Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.285-292, 1984. New York. North-Holland
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.325-327, 2002. Pennington, NJ. Electrochemical Society
Xiang, Q. ; Krivokapic, Z. ; Maszara, W. ; Lin, M. -R.
出版情報:
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium. pp.86-96, 2004. Pennington, N.J.. Electrochemical Society
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.325-327, 2002. Pennington, NJ. Electrochemical Society
Abedrabbo, S. ; Ravindra, N. M. ; Chen, W. ; Rajasekhar, V. ; Golota, T. ; Gokce, O. H. ; Nguyenphu, A. T. Fiory B. ; Nanda, A. ; Speranza, T. ; Maszara, W. ; Williamson, G.
出版情報:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.69-, 1997. Pittsburgh, PA. MRS - Materials Research Society
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