1.

国際会議録
国際会議録
1. Characterization of Structural Quality of Bonded Silicon-on-Insulator Wafers by Spectroscopic Ellipsometry and Raman Spectroscopy
Nguyen, N.V. ; Maslar, J.E. ; Kim, Jin-Yong ; Han, Jin-Ping ; Park, Jin-Won ; Chandler-Horowitz, D. ; Vogel, E.M.
出版情報: High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.127-132,  2004.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 809
2.

国際会議録
国際会議録
2. In-Situ Gas-Phase Optical Measurements of Silane Decomposition in a Thermal Chemical Vapor Deposition Reactor
Maslar, J.E. ; Hurst, W.S. ; Kremer, D.M. ; Ehrman, S.H.
出版情報: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.168-175,  2001.  Pennington, N.J..  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2001-13