1.

テクニカルペーパー
テクニカルペーパー
1. Stability and Axenicity in the MELiSSA Loop.
Hendrickx, L. ; Janssen, P. ; Baatout, S. ; Marty, F. ; Mergeay, M.
出版情報: 33rd International Conference on Environmental Systems : SAE technical paper.  2003.  Warrendale, Penn..  Society of Automotive Engineers
シリーズ名: Society of Automotive Engineers technical paper series
シリーズ巻号: 2003
2.

国際会議録
国際会議録
2. Fabrication and characterization of resonant SOI micromechanical silicon sensors based on DRIE micromachining, freestanding release process and silicon direct bonding
Gigan, O. ; Chen, H. ; Robert, O. ; Renard, S. ; Marty, F.
出版情報: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.194-204,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4936
3.

国際会議録
国際会議録
3. A MEMS sensor for the measurement of density-viscosity for oilfield applications [6111-15]
Harrison, C. ; Ryu, S. ; Goodwin, A. ; Hsu, K. ; Donzier, E. ; Marty, F. ; Mercier, B.
出版情報: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V.  pp.61110D-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6111