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Chlorine Precursors for Gate Oxidation Processes

著者名:
McGeary, M. J.
Martens, P. W.
Vermeire, B.
Heyns, M.
Sprey, H.
Lubbers, A.
Schaekers, M.
さらに 2 件
掲載資料名:
Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
447
発行年:
1997
開始ページ:
115
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993518 [1558993517]
言語:
英語
請求記号:
M23500/447
資料種別:
国際会議録

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