Lin, H.-N, ; Stoner, R. J. ; Maris, H. J. ; Harper, J. M. E. ; Cabral Jr., C. ; Halbout, J.-M ; Rubloff, G. W.
出版情報:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.221-226, 1992. Pittsburgh, Pa.. Materials Research Society
Tas, G. ; Loomis, J. J. ; Maris, H. J. ; Bailes, A. A., III. ; Seiberling, L. E.
出版情報:
Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.. pp.369-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.. pp.483-, 2000. Warrendale, Pa.. MRS-Materials Research Society
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