1.

国際会議録
国際会議録
1. Boron-Interstitial Cluster Kinetics : Extraction of Binding Energies From Dedicated Experiments
Ortiz, Christophe J. ; Pichler, Peter ; Haublein, Volker ; Mannino, Giovanni ; Scalese, Silvia ; Privitera, Vittorio ; Solmi, Sandro ; Lerch, Wilfried
出版情報: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.295-300,  2004.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 810
2.

国際会議録
国際会議録
2. Shallow Junctions for Sub-100 nm CMOS Technology
Meyssen, Veerle ; Stolk, Peter ; Zijl, Jeroen van ; Berkum, Jurgen van ; Wijgert, Willem van de ; Lindsay, Richard ; Dachs, Charles ; Mannino, Giovanni ; Cowern, Nick
出版情報: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 669