Yakovlev, E. V. ; Talalaev, R. A. ; Karpov, S. Yu. ; Shpolyanskiy, Yu. A. ; Makarov, Yu. N. ; Lowry, S. A.
出版情報:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.153-, 2000. Warrendale, PA. MRS-Materials Research Society
Egorov, Yu. E. ; Makarov, Yu. N. ; Rudinsky, E. A. ; Smirnov, E. M. ; Zhmakin, A. I.
出版情報:
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.181-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Vodakov, Yu. A. ; Mokhov, E. N. ; Ramm, M. G. ; Ramm, M. S. ; Roenkov, A. D. ; Ostroumov, A. G. ; Wolfson, A. A. ; Karpov, S. Yu. ; Makarov, Yu. N. ; Jurgensen, H.
出版情報:
Nitride semiconductors : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.. pp.27-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Segal, A. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu. N.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.567-577, 2002. Pennington, NJ. Electrochemical Society