Rayner, U.B., Jr. ; Kang, D. ; Schultz, M. ; Mai, K. ; Lucovsky, G.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.413-428, 2002. Pennington, NJ. Electrochemical Society
Rayner, U.B. ; Kang, D., Jr. ; Schultz, M. ; Mai, K. ; Lucovsky, G.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.413-428, 2002. Pennington, NJ. Electrochemical Society
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