Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium. pp.396-401, 1999. Pennington, N. J.. Electrochemical Society
Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium. pp.187-192, 1999. Pennington, N. J.. Electrochemical Society
Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.. pp.E1.7-, 2001. Warrendale, PA. Materials Research Society
Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.. pp.E7.8-, 2001. Warrendale, PA. Materials Research Society