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STRUCTURE AND PROPERTIES OF TITANIUM NITRIDE AND ZIRCONIUM NITRIDE THIN FILMS PREPARED BY REACTIVE ION PLATING

著者名:
MOLARIUS, J. M. ( HELSINKI UNIV. OF TECHNOL., ESPOO )  
掲載資料名:
NASA Technical Reports(N88-)
発行年:
1987
通号:
N88-22167
ペーパー番号:
N88-22167
開始ページ:
1
終了ページ:
83
総ページ数:
83
出版情報:
National Aeronautics and Space Administration
言語:
英語
資料種別:
テクニカルペーパー

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