G. Kennedy ; S. Tanaka ; Y. Hayashi ; M. Kurihara ; K. Hokamoto
出版情報:
Explosion, shock wave and high energy reaction phenomena : selected, peer reviewed papers from International Symposium on Explosion, Shock wave & High-energy reaction Phenomena 2010 (3rd ESHP Symposium), 1-3 September 2010, Seoul National University, Seoul, Korea. pp.285-290, 2011. Aedermannsdorf, Switzerland. Trans Tech Publications
G. Kennedy ; N. Wada ; Y. Hayashi ; M. Kurihara ; K. Hokamoto
出版情報:
Explosion, shock wave and high energy reaction phenomena : selected, peer reviewed papers from International Symposium on Explosion, Shock wave & High-energy reaction Phenomena 2010 (3rd ESHP Symposium), 1-3 September 2010, Seoul National University, Seoul, Korea. pp.143-148, 2011. Aedermannsdorf, Switzerland. Trans Tech Publications
M. Arai ; H. Inomata ; T. Nishimura ; M. Kurihara ; N. Hayashi
出版情報:
Photomask and X-ray mask technology II : 20-21 April 1995, Kawasaki City, Kanagawa, Japan. pp.74-87, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
M. Kurihara ; M. Komada ; H. Moro-oka ; N. Hayashi ; H. Sano
出版情報:
Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V : 20-21 February 1995, Santa Clara, California. pp.240-252, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
M. Kurihara ; S. Hatakeyama ; K. Yoshida ; M. Abe ; D. Totsukawa
出版情報:
Photomask and next-generation lithography mask technology XV. 2 pp.70282T-1-70282T-7, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
K. Yoshida ; K. Kojima ; M. Abe ; S. Sasaki ; M. Kurihara
出版情報:
Photomask and next-generation lithography mask technology XV. 2 pp.70281V-1-70281V-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering