K. Yanagisawa ; N.Z. Bao ; M. Kariya ; A. Onda ; K. Kajiyoshi ; Z. Matamoras-Veloza ; J.C. Rendon-Angeles
出版情報:
Eco-materials processing and design VIII : ISEPD-8, proceedings of the 8th International Symposium on Eco-Materials Processing and Design, January 11-13, 2007, Kitakyushu, Japan. pp.537-540, 2007. Stafa-Zuerich, Switzerland. Trans Tech Publications
M. Kariya ; E. Yamanaka ; K. Yoshida ; K. Konomi ; M. Satake
出版情報:
Photomask and next-generation lithography mask technology XV. 2 pp.70282U-1-70282U-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering