Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment. pp.15-22, 2007. Pennington, NJ. Electrochemical Society
THERMEC 2006 : supplement to THERMEC 2006, 5th International conference on processing and manufacturing of advanced materials, July 4-8, 2006, Vancouver, Canada. 539-543 pp.1638-1643, 2007. Stafa-Zuerich. Trans Tech Publications
N. Kashaev ; S. Riekehr ; M. Horstmann ; V. Ventzke
出版情報:
THERMEC 2013 : Selected, peer reviewed papers from the 8th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS Processing, Fabrication, Properties, Applications, December 2-6, 2013, Las Vegas, USA. pp.2310-2315, 2014. Aedermannsdorf, Switzerland. Trans Tech Publications
T. Feudel ; B. Bayha ; G. Burbach ; M. Gerhardt ; L. Herrmann ; M. Herden ; T. Mantei ; E. Ehrichs ; M. Greenlaw ; M. Horstmann
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment. pp.373-380, 2007. Pennington, NJ. Electrochemical Society
M. Reiche ; C. Himcinschi ; U. Gösele ; S. Christiansen ; S. Mantl ; D. Buca ; Q. Zhao ; S. Feste ; R. Loo ; D. Nguyen ; W. Buchholtz ; A. Wei ; M. Horstmann ; D. Feijoo ; P. Storck
出版情報:
Silicon-on-insulator technology and devices 13. pp.339-344, 2007. Pennington, N.J.. Electrochemical Society