J.-S. Park ; J. Bai ; M. Curtin ; B. Adekore ; Z. Cheng ; M. Carroll ; M. Dudley ; A. Lochtefeld
出版情報:
Semiconductor defect engineering--materials, synthetic structures and devices II : symposium held April 9-13, 2007, San Francisco, California, U.S.A.. pp.315-320, 2007. Warrendale, Pa.. Materials Research Society
Microfluidics, bioMEMS, and medical microsystems V : 22-24 January 2007, San Jose, California, USA. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering