Luoto, H. ; Suni, T. ; Henttinen, K. ; Kulawski, M.
出版情報:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.194-204, 2005. Pennington, NJ. Electrochemical Society
Suni, T. ; Henttinen, K. ; Dekker, J. ; Luoto, H. ; Kulawski, M. ; Makinen, J. ; Mutikainen, R.
出版情報:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.216-225, 2005. Pennington, NJ. Electrochemical Society
Suni, T. ; Henttinen, K. ; Lipsainen, A. ; Dekker, J. ; Luoto, H. ; Kulawski, M.
出版情報:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.173-183, 2005. Pennington, NJ. Electrochemical Society