Tomaszewski, D. ; Lukasiak, L. ; Gibki, J. ; Domanski, K. ; Jakubowski, A. ; Zareba, A.
出版情報:
Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001). VOL-1 pp.725-728, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Lukasiak, L. ; Kamieniecki, E. ; Jakubowski, A. ; Ruzyllo, J.
出版情報:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.425-430, 2003. Pennington, N.J.. Electrochemical Society
Roman, P. ; Lee, D.D. ; Wang, J. ; Mumbauer, P. ; Grant, R. ; Tower, J. ; Kamieniecki, E. ; Lukasiak, L. ; Ruzyllo, aud J.
出版情報:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.207-212, 2001. Pennington, N.J.. Electrochemical Society