Riemann, H. ; Luedge, A. ; Boettcher, K. ; Rost, H-J. ; Hallmann, B. ; Schroeder, W. ; Hensel, W. ; Schleusener, B.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.111-123, 1994. Pennington, NJ. Electrochemical Society
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.109-120, 1995. Pennington, NJ. Electrochemical Society