Lee, David R. ; Parker, Christopher G. ; Hauser, John R. ; Lucovsky, Gerald
出版情報:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.243-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.103-108, 2002. Warrendale. Materials Research Society
Rayner, Gilbert ; Therrien, Jr., Robert ; Lucovsky, Gerald
出版情報:
Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A.. pp.C1.3-, 2001. Warrendale, PA. Materials Research Society