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DEPOSITION OF DIELECTRIC FILMS BY REMOTE PLASMA ENHANCED CVD

著者名:
掲載資料名:
Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
68
発行年:
1986
開始ページ:
323
終了ページ:
334
総ページ数:
12
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837340 [0931837340]
言語:
英語
請求記号:
M23500/68
資料種別:
国際会議録

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