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出版情報:
Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.. pp.239-, 1998. Warrendale, Pa.. MRS - Materials Research Society
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出版情報:
Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.129-, 1999. Warrendale, PA. MRS-Materials Research Society
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出版情報:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. pp.17-22, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering