Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability. pp.244-255, 1998. Pennington, N.J.. Electrochemical Society
Lin, Q. Y. ; Cheng, A. ; Sudijono, J. L. ; Lin, C.
出版情報:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.186-197, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Lin, C. -C. ; De Maagt, P. J. I. ; Narhi, T. ; Piironen, P. ; Mees, J. ; Weber, T. ; Mosig, J. ; Otero, P. ; Hansen, V. ; Vaupel, T. ; Hartnagel, H. L. ; Lin, C. ; Simon, A. ; Mottonen, V. ; Raisanen, A. ; Kollberg, E. L. ; Merkel, H. F. ; Zimmermann, P.
出版情報:
Terahertz spectroscopy and applications II. pp.417-425, 1999. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Chemical and biological standoff detection : 28-30 October 2003, Providence, Rhode Island, USA. pp.282-287, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Bersuker, U. ; Zeitzoff, P. ; Brown, G. ; Kim, Y. ; Hoe, A. ; Lin, C. ; Young, C. ; Lysoght, P. ; Gardner, M. ; Murto, R. W ; Huff, H. R.
出版情報:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.417-422, 2003. Pennington, NJ. Electrochemical Society
Goh, K ; Chen, F ; Balakumar, S. ; Higelin, G. ; See, A. ; Chan, L. ; Lin, C. ; Chern, C.
出版情報:
Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium. pp.57-70, 1999. Pennington, N. J.. Electrochemical Society
Proceedings of the fifth International Symposium on Redox Mechanisms and Interfacial Properties of Molecules of Biological Importance 1993. pp.197-204, 1993. Pennington, NJ. Electrochemical Society
Corrosion and reliability of electronic materials and devices : proceedings of the fourth international symposium. pp.282-287, 1999. Pennington, NJ. Electrochemical Society
Zhang, M. ; Lin, C. ; Hemment, P.L.F. ; Gutjahr, K. ; Goesele, U.
出版情報:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices. pp.86-91, 1997. Pennington, NJ. Electrochemical Society
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