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出版情報:
Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium. pp.79-94, 1999. Pennington, NJ. Electrochemical Society
Lii, T. ; Park, E. ; Lutz, J. ; Wu, W. ; Simpson, L. ; Mui, D.
出版情報:
Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes. pp.79-84, 1997. Pennington, NJ. Electrochemical Society
Materials science of high temperature polymers for microelectronics : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.. pp.265-272, 1991. Pittsburgh, Pa.. Materials Research Society
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