Lefakis, H. ; Liehr, M. ; Rubloff, G.W. ; Ho, P.S.
出版情報:
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA. pp.133-138, 1985. Pittsburgh, Pa.. Materials Research Society
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA. pp.469-478, 1985. Pittsburgh, Pa.. Materials Research Society
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.3-18, 1992. Pittsburgh, Pa.. Materials Research Society
Initial stages of epitaxial growth : symposium held April 22-24, 1987, Anaheim, California, U.S.A.. pp.121-126, 1987. Pittsburgh, Pa.. Materials Research Society
Cohen, S. L. ; Rath, D. ; Lee, G. ; Furman, B. ; Pope, K. R. ; Tsai, R. ; Syverson, W. ; Gow, C. ; Liehr, M.
出版情報:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.13-, 1995. Pittsburgh, PA. MRS - Materials Research Society
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