1.

国際会議録
国際会議録
1. Computational and experimental study of spin coater air flow
Zhu,X. ; Liang,F. ; Haji-Sheikh,A. ; Ghariban,N.
出版情報: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 2  pp.1441-1451,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3333
2.

国際会議録
国際会議録
2. Selection of pattern in slit diffraction measurement and its influence on measurement accuracy
Liang,F.
出版情報: Optical measurement and nondestructive testing : Techniques and applications, 8-10 November 2000, Beijing, China.  pp.52-56,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4221