Lewis, S. ; DeBoer, J. ; Gole, J. ; Hesketh, P. J. (Georgia Institute of Technology)
出版情報:
Chemical sensors VI : chemical and biological sensors and analytical methods : proceedings of the international symposium. pp.125-132, 2004. Pennington,NJ. Electrochemical Society
Graham, R.R. ; Botros, B. ; Esmat, H.M. ; Ezz, W.N. ; Salmon, D.E. ; Fayaz, C. ; Oun, E.S. ; Rakha, M. ; Fahmy, D. ; Lewis, S. ; Soliman, A.K. ; Haleem, A. El ; Raouf, A. El ; Behairy, S. El ; Weleily, N.M. El ; Ramadan, K.A. ; Aziz, G.A. El ; Hallaj, Z.
Venkataram, S. ; Khanna, N. ; Lewis, S. ; Khera, G.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XVI. Part Two pp.892-903, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering