1.

国際会議録
国際会議録
1. Theoretical and Experimental Investigation of ILD Removal Rates, Coefficient of Friction, and Pad Flattening Ratio
Len Borucki ; H. Lee ; Y. Zhuang ; A. Philipossian
出版情報: Electrodeposition Processes in Semiconductor Device Fabrication.  pp.91d-,  2004.  New York.  American Institute of Chemical Engineers
シリーズ名: AIChE Conference Proceedings
シリーズ巻号: P-213(T8)
2.

国際会議録
国際会議録
2. Theoretical and Experimental Investigation of ILD Removal Rates, Coefficient of Friction, and Pad Flattening Ratio
Len Borucki ; H. Lee ; Y. Zhuang ; A. Philipossian
出版情報: 2004 AIChE annual meeting, Austin Covention Center, Austin, Texas, November 7-12 : conference proceedings.  pp.91d-,  2004.  New York.  American Institute of Chemical Engineers
シリーズ名: AIChE Conference Proceedings
シリーズ巻号: P-213