Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.352-359, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 18-22 September 2000. pp.107-110, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Gas and chemical lasers and intense beam applications II : 25-26 January 1999, San Jose, California. pp.117-124, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Ultrafast phenomena in semiconductors IV : 27-28 January 2000, San Jose, California. pp.16-26, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 2001 : modeling, signal processing, and control in smart structures : 5-8 March, 2001, Newport Beach, USA. pp.284-294, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Display technologies II : 9-11 July 1998, Taipei, Taiwan. pp.152-158, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Metrology, Inspection, and Process Control for Microlithography XI. pp.270-281, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering