1.

国際会議録
国際会議録
1. Kinetics and Rheological Changes of Thermoset Polymers in Reactive Processing
Lee, L. J. ; Lee, Y. M. ; Yang, Y. S.
出版情報: Plastics-pioneering the 21st century : conference proceedings.  pp.719-723,  1987.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
シリーズ名: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
シリーズ巻号: 33
2.

国際会議録
国際会議録
2. Statistical analysis of CD-SEM measurement and process control in the indistinguishable multi-process patterns [6152-100]
Yang, D. S. ; Jung, M. H. ; Lee, Y. M. ; Koh, C. W. ; Yeo, G. S. ; Woo, S. G. ; Cho, H. K. ; Moon, J. T.
出版情報: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6152