1.

国際会議録
国際会議録
1. THE REACTION OF OZONE AND H2O2 IN AMMONIUM HYDROXIDE (NH4OH) SOLUTIONS AND THEIR REACTION WITH SILICON WAFERS
Eom, Dae-Hong ; Kim, Sang-Yong ; Lee, Kang-Kuk ; Kim, Ki-Sub ; Song, Hyung-Soo ; Park, Jin-Goo
出版情報: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.288-295,  1999.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-36
2.

国際会議録
国際会議録
2. Determination of optical properties of fluorocarbon polymer thin films by a variable angle spectroscopic ellipsometry
Lee, Kang-Kuk ; Park, Jin-Goo ; Shin, Hyung-Jae
出版情報: Optical microstructural characterization of semiconductors : sympoisum held November 29-30, 1999, Boston, Massachusetts, U.S.A..  pp.297-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 588