Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.458-463, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Yao, L. G. ; Lee, K. C. ; Chen, S. C. ; Liang, M. S. (TSMC)
出版情報:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.581-588, 2004. Pennington, N.J.. Electrochemical Society
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China. pp.3923-3926, 2005. Uetikon-Zuerich. Trans Tech Publications