Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.37-43, 1996. Pennington, NJ. Electrochemical Society
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.18-26, 1996. Pennington, NJ. Electrochemical Society
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B10.1-, 2001. Warrendale, PA. Materials Research Society
Jones, K.S. ; Banisaukis, H. ; Earles, S. ; Lindfors, C. ; Griglione, M. ; Law, M.E. ; Taiwar, S. ; Falk, S.W. ; Downey, D.F. ; Agarwal, A.
出版情報:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium. pp.119-128, 2000. Pennington, NJ. Electrochemical Society
Jacques, J.M. ; Burbure, N. ; Jones, K.S. ; Law, M.E. ; Robertson, L.S. ; Downey, D.F. ; Rubin, L.M. ; Bennett, J. ; Beebe, M. ; Klimov, M.
出版情報:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.443-448, 2004. Warrendale, Pa.. Materials Research Society
Camarce, C. ; Radic, L. ; Keys, P. ; Brindos, R ; Jones, K.S. ; Law, M.E.
出版情報:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.357-362, 2004. Warrendale, Pa.. Materials Research Society
Phen, M.S. ; Crosby, R.T. ; Craciun, V. ; Jones, K.S. ; Law, M.E. ; Hansen, J.L. ; Larsen, A.N.
出版情報:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.369-376, 2005. Warrendale, Pa.. Materials Research Society
Lin, J. ; El Kouche, A. ; Law, M.E. ; Ren, F. ; Kang, B.S. ; Pearton, S.J. ; Norton, D. ; Abernathy, C.R.
出版情報:
State-of-the-art program on compound semiconductors (SOTAPOCS XLII) and processes at the compound-semiconductor/solution interface : proceedings of the international symposia. pp.449-460, 2005. Pennington, N.J.. Electrochemical Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.183-188, 2004. Warrendale, Pa.. Materials Research Society
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