Brindos, R. ; Keys, P.H. ; Griglione, M. ; Jones, K. S. ; Law, M. E. ; Agarwal, Aditya ; Andideh, Ebrahim
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B8.4-, 2001. Warrendale, PA. Materials Research Society
Law, M. E. ; Jones, K. S. ; Earles, S. K. ; Lilak, A. D. ; Xu, J-W.
出版情報:
Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.3-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.379-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Dokumaci, O. ; Gossmann, H-J. ; Jones, K. S. ; Law, M. E.
出版情報:
Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.151-, 1997. Pittsburgh, Penn. MRS - Materials Research Society
Brindos, R. ; Law, M. E. ; Jones, K. S. ; Andideh, E.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.169-, 1999. Warrendale, PA. MRS - Materials Research Society
Adam, L. S. ; Law, M. E. ; Dokumaci, O. ; Haddara, Y. ; Murthy, C. ; Park, H. ; Hegde, S. ; Chidambarrao, D. ; Mollis, S. ; Domenicucci, T. ; Dziobkowski, C. ; Jones, K. ; Wong, P. ; Young, R. ; Srinivasan, R.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.277-, 1999. Warrendale, PA. MRS - Materials Research Society
Li, J. ; Keys, P. ; Chen, J. ; Law, M. E. ; Jones, K. S. ; Jasper, C.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.175-, 1999. Warrendale, PA. MRS - Materials Research Society
Keys, P. H. ; Li, J. H. ; Heitman, E. ; Packan, P. A. ; Law, M. E. ; Jones, K. S.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.199-, 1999. Warrendale, PA. MRS - Materials Research Society
Bharatan, S. ; Haddara, Y. M. ; Law, M. E. ; Jones, K. S.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.111-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Law, M. E. ; Jones, K. S. ; Earles, S. K. ; Lilak, A. D. ; Xu, J-W.
出版情報:
Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.45-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
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