1.

国際会議録
国際会議録
1. Continuous Real-Time Detection of Molecular Fluorine (F2) Emitted as a By-Product Of CVD and Etch Processes
Laush, C. ; Vartanian, V. ; Mendicino, L. ; Brown, P.T.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.72-81,  2000.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-7
2.

国際会議録
国際会議録
2. Continuous Optical Monitoring of Gaseous Halogens from Tool Effluents
Laush, C. ; Mendicino, L. ; Brown, P.T.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.126-134,  1999.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-8