Bellani, V. ; Amiotti, M. ; Geddo, M. ; Guizzetti, G. ; Landgren, G.
出版情報:
Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.225-, 1994. Pittsburgh. MRS - Materials Research Society
Kuznetsov, A. Yu. ; Christensen, J. S. ; Linnarsson, M. K. ; Svensson, B. G. ; Radamson, H. H. ; Grahn, J. ; Landgren, G.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.271-, 1999. Warrendale, PA. MRS - Materials Research Society