Gui, C. ; Elwenspoek, M. ; Gardeniers, J.G.E. ; Lambeck, P.V.
出版情報:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.114-126, 1997. Pennington, NJ. Electrochemical Society
Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium. pp.191-205, 2001. Pennington, N.J.. Electrochemical Society