De Gendt, S. ; Lux, M. ; Claes, M. ; Van Hoeymissen, J. ; Conrad, T. ; Worth, W. ; Lagrange, S. ; Bergman, E. ; Jassal, A.S. ; Mertens, P.W. ; Heyns, M.M.
出版情報:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.391-398, 1999. Pennington, NJ. Electrochemical Society
Claes, M. ; Rohr, E. ; De Gendt, S. ; Lagrange, S. ; Bergman, E. ; Heyns, M.
出版情報:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.314-321, 2001. Pennington, N.J.. Electrochemical Society