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CHARACTERISTICS AND RECOVERY OF Si SURFACES PLASMA ETCHING IN CHF3/C2F6

著者名:
Park, H.-H.
Kwon, K.H.
Koak, B.-H.
Lee, S.-M.
Kwon, O-J.
Kim, B.-W.
Lee, J.-W.
Yoo, J.-B.
Sung, Y.-K.
さらに 4 件
掲載資料名:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
259
発行年:
1992
開始ページ:
219
終了ページ:
224
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991545 [1558991549]
言語:
英語
請求記号:
M23500/259
資料種別:
国際会議録

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