Ressel, P. ; Wang, L. C. ; Park, M. H. ; Leech, P. W. ; Reeves, G. K. ; Kuphal, E.
出版情報:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.577-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Leech, P. W. ; Ressel, P. ; Reeves, G. K. ; Zhou, W. ; Kuphal, E.
出版情報:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.419-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Barnard, W.O. ; Myburg, G. ; Auret, F.D. ; Ressel, P. ; Kuphal, E.
出版情報:
Proceedings of the Symposium on Nondestructive Wafer Characterization for Compound Semiconductor Materials and the twenty-second State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXII). pp.305-316, 1995. Pennington, NJ. Electrochemical Society
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